Six reasons to consider the MicroSense Mini precision position sensor

The MicroSense Mini, from KLA-Tencor’s ADE Division, is a precision linear position sensor that delivers nanometre-level resolution over measurement ranges up to a millimetre. Ideal for short travel, precision positioning applications, the sensors provide position feedback in mechanisms such as piezo-driven positioning stages, micro-actuators and scanning probe microscope stages. 

There are many benefits to using these small sensors, including:

• Compact size. Because of their small size, MicroSense Mini sensor heads mount easily in space-restricted areas, and require much less mounting space than an optical encoder or laser interferometer. 
• Direct measurement. The MicroSense Mini uses any grounded, conductive surface as a target, providing direct measurement of the moving target. No linear scale or mirror is required.
• High resolution. The non-contact position sensor’s resolution is to the sub-nanometre level. 
• High accuracy, fast response. With the MicroSense Mini, 0.02 per cent full-scale linearity is typical, with no cyclical error or hysteresis.
• Works with any conductive target. Material or finish has no impact on accuracy.
• Easy installation. The sensor head mounts in a simple precision hole.

The MicroSense Mini consists of a compact electronics module, with connections for power, analog output and a serial port. The sensor head, which detects the target, is connected to the electronics module via a 1.5-metre long cable. 

The MicroSense Mini is available in a variety of sizes from Pickering, Ont.-based Durham Instruments. With more than 50 years of experience in the instrumentation field, the company offers expert solutions for any measuring problem. Contact Durham Instruments for more information on this or any of its other offerings.  

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